JPH01136181U - - Google Patents
Info
- Publication number
- JPH01136181U JPH01136181U JP2671788U JP2671788U JPH01136181U JP H01136181 U JPH01136181 U JP H01136181U JP 2671788 U JP2671788 U JP 2671788U JP 2671788 U JP2671788 U JP 2671788U JP H01136181 U JPH01136181 U JP H01136181U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- chamber
- heater
- vacuum
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 150000004678 hydrides Chemical class 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2671788U JPH01136181U (en]) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2671788U JPH01136181U (en]) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01136181U true JPH01136181U (en]) | 1989-09-18 |
Family
ID=31248596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2671788U Pending JPH01136181U (en]) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01136181U (en]) |
-
1988
- 1988-02-29 JP JP2671788U patent/JPH01136181U/ja active Pending